Product Guide
ATM to High-Vacuum Gauge - HPG400
Classification:
Company:
Alte Landstr. 6
9496 Balzers
Liechtenstein
Dipl. Ing. Rolf Enderes
Tel +423 388 3111
https://www.inficon.com
reach.liechtenstein(at)inficon(dot)com
Illustration:
Product description:
The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1.5×10-6 Torr to atmosphere). The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.